TY  - BOOK
AU  - Will, Conley
TI  - Advances in resist technology and processing XV
SN  - 9780819427786
U1  - 670 CON 
PY  - 1998///
CY  - Bellingham, WA
PB  - SPIE
KW  - Resist technology
N1  - Includes index
ER  -