TY  - BOOK
AU  - Roozeboom, Fred
ED  - NATO Advanced Study Institute on Advances in Rapid Thermal and Integrated Processing (1995 : Acquafredda di Maratea, Italy), North Atlantic Treaty Organization. Scientific Affairs Division
TI  - Advances in rapid thermal and integrated processing
SN  - 9780792340119
SN  - 96013321
U1  - 621.3815 ROO 
PY  - 1996///
CY  - Boston
PB  - Kluwer Academic Publishers
KW  - Rapid thermal processing - Congresses
KW  - Semiconductors - Heat treatment - Congresses
N1  - Includes bibliographical references and index
ER  -