Advances in rapid thermal and integrated processing 
edited by Fred Roozeboom 
 - Boston  Kluwer Academic Publishers  1996 
 - xii, 565 p. : ill. ; 25 cm 
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780792340119 
<br/><br/><label>ISSN: </label>96013321 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Rapid thermal processing - Congresses<br/>Semiconductors - Heat treatment - Congresses
<br/><br/><label>Dewey Class. No.: </label>621.3815 ROO