TY  - BOOK
AU  - Wei, Yayi
AU  - Brainard, Robert L
TI  - Advanced processes for 193-nm immersion lithography
SN  - 9780819475572
SN  - 200805074
U1  - 621.381531 WEI 
PY  - 2009///
CY  - Bellingham, Wash
PB  - SPIE
KW  - Immersion lithography
KW  - Integrated circuits - Design and construction
KW  - Semiconductors - Etching
N1  - Includes bibliographical references and index
ER  -