TY  - BOOK
AU  - Progler, Christopher J
AU  - Wang, Yangyuan
AU  - Yao, Jun'en
ED  - Australian Optical Society, Guo jia zi ran ke xue ji jin wei yuan hui (China), Society of Photo-optical Instrumentation Engineers, Zhongguo guang xue xue hui
TI  - Advanced microlithography technologies : 8-10 November, 2004, Beijing, China
SN  - 9780819456007
SN  - 200529911
U1  - 621.381531 WAN 
PY  - 2005///
CY  - Bellingham, Wash
PB  - SPIE
KW  - Integrated circuits - Masks - Congresses
KW  - Manufacturing processes - Congresses
KW  - Microlithography - Congresses
KW  - X-ray lithography - Congresses
N1  - Includes bibliographical references and author index
ER  -