TY  - BOOK
AU  - Gupta, Subhash
AU  - Harrison, H. Barry
AU  - Wee, Andrew T. S
ED  - Institute of Physics, Singapore, Nanyang Technological University, Society of Photo-optical Instrumentation Engineers
TI  - Advanced microelectronic processing techniques : 28-30 November 2000, Singapore
SN  - 9780819438997
SN  - 200127320
U1  - 621.38152 HAR 
PY  - 2000///
CY  - Bellingham, Wash
PB  - SPIE
KW  - Epitaxy - Congresses
KW  - Integrated circuits - Design and construction - Congresses
KW  - Semiconductor wafers - Congresses
KW  - Semiconductors - Characterization - Congresses
N1  - Errata p. tipped in. Includes bibliographical references and index
ER  -