Advanced microelectronic processing techniques : 28-30 November 2000, Singapore 
H. Barry Harrison, Andrew T.S. Wee, Subhash Gupta, chairs/editors, ; sponsored by Nanyang Technological University (Singapore) [and] SPIE--the International Society for Optical Engineering ; cooperating organizations, Institute of Physics (Singapore) ... [et al.] 
 - Bellingham, Wash  SPIE  c2000 
 - xix, 212 p. : ill. ; 28 cm 
<br/><br/> Errata p. tipped in. Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780819438997 
<br/><br/><label>ISSN: </label>2001273204 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Epitaxy - Congresses<br/>Integrated circuits - Design and construction - Congresses<br/>Semiconductor wafers - Congresses<br/>Semiconductors - Characterization - Congresses
<br/><br/><label>Dewey Class. No.: </label>621.38152 HAR