TY  - BOOK
AU  - Crean, G
AU  - Gessner, T
AU  - Torres, J
ED  - European Materials Research Society. Meeting (1996 : Strasbourg, France), Symposium J on Advanced Materials for Interconnections (1996 : Strasbourg, France)
TI  - Advanced materials for interconnections : proceedings of symposium J on advanced materials for Interconnections of the 1996 E-MRS spring conference, Strasbourg, France, June 4-7,1996
SN  - 9780444205070
SN  - 98149199
U1  - 621.381 GES 
PY  - 1997///
CY  - Amsterdam
PB  - Elsevier
KW  - Chemical vapor deopsition - Congresses
KW  - Dielectrics - Congresses
KW  - Microelectronics - Materials - Congresses
N1  - Includes bibliographical references and index
ER  -