TY - BOOK AU - Duparré, Angela AU - Singh, Bhanwar ED - Boeing Company, Society of Photo-optical Instrumentation Engineers TI - Advanced characterization techniques for optical, semiconductor, and data storage components : 9-11 July 2002, Seattle, Washington, USA SN - 9780819445469 SN - 200353527 U1 - 621.36 DOP PY - 2002/// CY - Bellingham, Wash PB - SPIE KW - Information storage and retrieval systems - Congresses KW - Metrology - Congresses KW - Optical materials - Congresses KW - Semiconductors - Characterization - Congresses N1 - Includes bibliographical references and index ER -