TY  - BOOK
AU  - Liu, Ai-Qun
TI  - Photonic MEMS devices : design, fabrication and control
SN  - 9781420045680
SN  - 200830121
U1  - 621.381 LIU 
PY  - 2009///
CY  - Boca Raton, FL
PB  - CRC Press
KW  - Microelectromechanical systems
KW  - Photonics
N1  - Includes bibliographical references and index
ER  -