Liu, Ai-Qun <br/><br/>
Photonic MEMS devices : design, fabrication and control 
Ai-Qun Liu ; co-authors, Xuming Zhang ... [et al.] 
 - Boca Raton, FL  CRC Press  2009 
 - 483 p. : ill. ; 27 cm 
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9781420045680 
<br/><br/><label>ISSN: </label>2008301219 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems<br/>Photonics
<br/><br/><label>Dewey Class. No.: </label>621.381 LIU