Sub-half-micron lithography for ULSIs 
edited by Katsumi Suzuki, Shinji Matsui, and Yukinori Ochiai 
 - Cambridge  Cambridge University Press  2000 
 - xvii, 323 p. : ill. ; 25 cm 
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780521022347 
<br/><br/><label>ISSN: </label>99013558 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits - Ultra large scale integration - Design and construction<br/>Microlithography<br/>Printed circuits - Design and construction
<br/><br/><label>Dewey Class. No.: </label>621.395 SUZ