TY  - BOOK
AU  - Matsui, Shinji
AU  - Ochiai, Yukinori
AU  - Suzuki, Katsumi
TI  - Sub-half-micron lithography for ULSIs
SN  - 9780521570800
U1  - 621.395 SUZ 
PY  - 2000///
CY  - Cambridge
PB  - Cambridge University Press
KW  - Integrated circuits - Ultra large scale integration - Design and construction
KW  - Microlithography
KW  - Printed circuits - Design and construction
N1  - Includes bibliographical references and index
ER  -