TY  - BOOK
AU  - Asundi, Anand
AU  - Gorecki, Christophe
AU  - Osten, Wolfgang
ED  - Bas-Rhin (France). Conseil général, Comité national d'optique et de photonique (France), Society of Photo-optical Instrumentation Engineers, SPIE Europe
TI  - Optical micro- and nanometrology in microsystems technology : 5-7 April 2006, Strasbourg, France
SN  - 9780819462442
SN  - 200727157
U1  - 681.25 GOR 
PY  - 2006///
CY  - Bellingham, WA
PB  - SPIE
KW  - Metrology - Congresses
KW  - Microscopy - Congresses
KW  - Optical measurements - Congresses
KW  - Optical measurements - Industrial applications - Congresses
KW  - Photonics - Congresses
N1  - Includes bibliographical references and author index
ER  -