TY  - BOOK
AU  - Duparré, Angela
AU  - Singh, Bhanwar
ED  - Society of Photo-optical Instrumentation Engineers
TI  - Optical metrology roadmap for the semiconductor, optical, and data storage industries II : 2-3 August, 2001, San Diego, USA
SN  - 9780819441638
SN  - 200228002
U1  - 621.381045 DUP 
PY  - 2001///
CY  - Bellingham, WA
PB  - SPIE
KW  - Information retrieval - Technological innovations - Congresses
KW  - Optical measurements - Industrial applications - Congresses
KW  - Optoelectronic devices - Industrial applications - Congresses
KW  - Optoelectronics - Congresses
KW  - Surfaces (Technology) - Measurement - Congresses
N1  - Includes bibliographical references and index
ER  -