TY  - BOOK
AU  - Smith, Bruce W
ED  - International SEMATECH, Society of Photo-optical Instrumentation Engineers
TI  - Optical microlithography XVIII : 1-4 march, 2005, San Jose, California, USA
SN  - 9780819457349
U1  - 621.381531 SMI 
PY  - 2005///
CY  - Bellingham, WA
PB  - SPIE
KW  - Integrated circuits - Masks - Congresses
KW  - Manufacturing processes - Congresses
KW  - Microlithography - Congresses
KW  - X-ray lithography - Congresses
N1  - Includes bibliographical references and author index
ER  -