TY  - BOOK
AU  - Smith, Bruce W
ED  - International SEMATECH, Semiconductor Equipment and Materials International, Society of Photo-optical Instrumentation Engineers
TI  - Optical microlithography XVII : 24-27 February 2004, Santa Clara, California, USA
SN  - 9780819452900
U1  - 621.366 SMI 
PY  - 2004///
CY  - Bellingham, WA
PB  - SPIE
KW  - Integrated circuits - Masks - Congresses
KW  - Manufacturing processes - Congresses
KW  - Microlithography - Congresses
KW  - X-ray lithography - Congresses
N1  - Includes bibliographical references and index
ER  -