TY  - BOOK
AU  - Allen, James J
TI  - Micro electro mechanical system design
SN  - 9780824758240 ; 0824758242
U1  - 621.381 ALL 
PY  - 2005///, 2015 First Indian Reprint
CY  - Baca Raton, FL
PB  - Taylor & Francis
KW  - Conception technique
KW  - Engineering design
KW  - Microelectromechanical systems - Design and construction
N1  - Includes bibliographical references and index
ER  -