Micro electro mechanical system design
James J. Allen
- Special Indian edition
- Baca Raton, FL Taylor & Francis 2005, 2015 First Indian Reprint
- [xxvi], 465 p. : ill. ; 24 cm
Includes bibliographical references and index
9780824758240 ; 0824758242
Conception technique Engineering design Microelectromechanical systems - Design and construction