Hsu, Tai-Ran <br/><br/>
MEMS & microsystems 
Tai-Ran Hsu 
 - New Delhi  Tata McGraw-Hill  2002 
 - xii, 436 p. : ill. ; 24 cm 
<br/><br/> Includes index 
<br/><br/><label>ISBN: </label>9780070487093 
<br/><br/><label>Dewey Class. No.: </label>621.381 HSU