TY  - BOOK
AU  - Liu, Chang
TI  - Foundations of MEMS
SN  - 9788131764756
U1  - 621.3 LIU 
PY  - 2016///
CY  - New Delhi
PB  - Pearson
KW  - Microelectromechanical systems
N1  - Sixth Impression. Includes index
ER  -