TY  - BOOK
AU  - Gianchandani, Yogesh B
AU  - Tabata, Osamu
AU  - Zappe, Hans P
TI  - Comprehensive microsystems
SN  - 9780444521927
U1  - 621.381 GIA 
PY  - 2008///
CY  - Amsterdam
PB  - Elsevier
KW  - Microelectromechanical systems
ER  -