Comprehensive microsystems 
editors-in-chief, Yogesh B. Gianchandani, Osamu Tabata, Hans Zappe 
 - Amsterdam  Elsevier  2008 
 - 3 v. : ill. (some col.) ; 27 cm 
<br/><br/><label>ISBN: </label>9780444521927 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems
<br/><br/><label>Dewey Class. No.: </label>621.381 GIA