TY  - BOOK
AU  - Lin, Quinghuang
TI  - Advances in resist technology and processing XXIII 20-22 February, 2006, San Jose, California, USA
SN  - 9780819461964
U1  - 621.381531 LIN 
PY  - 2006///
CY  - California
PB  - The International Society
KW  - Microlithography
ER  -