Handbook of thin-film deposition processes and techniques : principles, methods, equipment, and applications 
edited by Krishna Seshan 
 - Park Ridge, NJ  Noyes Publications  2002 
 - xxviii, 629 p. : ill. ; 24 cm 
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780815514428 
<br/><br/><label>ISSN: </label>99088400 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Chemical vapor deposition - Handbooks, manuals, etc<br/>Thin film devices - Design and construction - Handbooks, manuals, etc<br/>Thin films - Handbooks, manuals, etc
<br/><br/><label>Dewey Class. No.: </label>621.381542 SES