Handbook of microlithography, micromachining, and microfabrication 
P. Rai-Choudhury, editor 
 - Bellingham, WA  Institution of Electrical Engineers, SPIE Optical Engineering Press  c1997 
 - 768 p. : ill. ; 26 cm 
<br/><br/> Includes bibliographical references and indexes 
<br/><br/><label>ISBN: </label>0819423785 
<br/><br/><label>ISSN: </label>96040237 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microfabrication<br/>Microlithography<br/>Micromachining
<br/><br/><label>Dewey Class. No.: </label>670 CHO