TY  - BOOK
AU  - Behringer, Uwe F. W
ED  - European Conference on Mask Technology for Integrated Circuits and Microcomponents (20th : 2004 : Dresden, Germany), Forschungszentrum Karlsruhe. Institute for Microstructure Technology, Semiconductor Equipment and Materials International, Europe, Society of Photo-optical Instrumentation Engineers, VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik
TI  - 20th European Conference on Mask Technology for Integrated Circuits and Microcomponents : 12-14 January 2004, Dresden, Germany
SN  - 9780819454379
U1  - 621.3815 BEH 
PY  - 2004///
CY  - Bellingham, WA
PB  - SPIE
KW  - Integrated circuits - Masks - Congresses
KW  - Microlithography - Congresses
N1  - Includes bibliographical references and index
ER  -