20th European Conference on Mask Technology for Integrated Circuits and Microcomponents : 12-14 January 2004, Dresden, Germany 
Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI-Society Microelectronics, Micro- and Precision Engineering (GMM) (Germany) [and] Institute for Microstructure Technology/Forschungszentrum Karlsruhe (Germany) ; cooperating organizations, SEMI Europe ..[et al.] 
 - Bellingham, WA  SPIE  c2004 
 - xxiv, 210 p. : ill. ; 28 cm. 
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780819454379 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits - Masks - Congresses<br/>Microlithography - Congresses
<br/><br/><label>Dewey Class. No.: </label>621.3815 BEH