18th European Conference on Mask Technology for Integrated Circuits and Microcomponents : proceedings : 15-16 January, 2002, Munich, Germany 
Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI--Society Microelectronics, Micro- and Precision Engineering (GMM) ..[et al. ; published by SPIE--The International Society for Optical Engineering] 
 - Bellingham, WA  SPIE  c2002 
 - xiii, 256 p. : ill. ; 28 cm. 
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780819445315 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits - Masks - Congresses<br/>Microlithography - Congresses
<br/><br/><label>Dewey Class. No.: </label>621.3815 BEH