TY  - BOOK
AU  - Mack, Chris A
AU  - Stevenson, Tom
ED  - European Optical Society, Institution of Electrical Engineers, Scottish Enterprise, Society of Photo-optical Instrumentation Engineers
TI  - Lithography for semiconductor manufacturing II : 30 may-1 June, 2001, Edinburgh, UK
SN  - 9780819441058
SN  - 200326804
U1  - 670 MAC 
PY  - 2001///
CY  - Bellingham, WA
PB  - SPIE
KW  - Integrated circuits - Design and construction - Congresses
KW  - Integrated circuits - Very large scale integration - Congresses
KW  - Microlithography - Congresses
KW  - Semiconductors - Etching - Congresses
N1  - Includes bibliographical references and index
ER  -