TY  - BOOK
AU  - Herzig, Hans Peter
AU  - Kley, Ernst-Bernhard
ED  - Society of Photo-optical Instrumentation Engineers
TI  - Lithographic and micromachining techniques for optical component fabrication II : 3-4 August, 2003, San Diego, California, USA
SN  - 9780819450562
SN  - 200429872
U1  - 681.4 BER 
PY  - 2003///
CY  - Bellingham, WA
PB  - SPIE
KW  - Lenses - Design and construction - Congresses
KW  - Microlithography - Congresses
KW  - Micromachining - Congresses
KW  - Optical instruments - Design and construction - Congresses
N1  - Includes bibliographical references and index
ER  -