Lithographic and micromachining techniques for optical component fabrication II : 3-4 August, 2003, San Diego, California, USA Ernst-Bernhard Kley, Hans Peter Herzig, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering - Bellingham, WA SPIE c2003 - vii, 208 p. : ill. ; 28 cm

Includes bibliographical references and index

9780819450562

2004298721


Lenses - Design and construction - Congresses
Microlithography - Congresses
Micromachining - Congresses
Optical instruments - Design and construction - Congresses

681.4 BER