TY - BOOK AU - Veĭko, V. P ED - Institut obshcheĭ fiziki (Rossiĭskai︠a︡ akademii︠a︡ nauk), Russia (Federation). Ministerstvo obrazovanii︠a︡, Society of Photo-optical Instrumentation Engineers, St. Petersburg Institute of Fine Mechanics and Optics TI - Laser-assisted microtechnology 2000 : 23-25 August 2000, St. Petersburg-Pushkin, Russia SN - 9780819438133 SN - 200127933 U1 - 621.381 VEI PY - 2001/// CY - Bellingham, WA PB - SPIE KW - Electronic industries - Technological innovations - Congresses KW - Laser ablation - Congresses KW - Lasers - Industrial applications - Congresses KW - Manufacturing processes - Congresses KW - Micromachining - Congresses N1 - Includes bibliographical references and index ER -