Laser applications in microelectronic and optoelectronic manufacturing XV : 25-28 January 2010, San Francisco, California, United States 
Hiroyuki Niino ... [et al.], editors ; sponsored by SPIE ; cosponsored by IPG (Beijing) Fiber Laser Technology Company, Ltd. (China) 
 - Bellingham, WA  SPIE  2010 
 - 1 online resource : ill 
<br/><br/><label>ISBN: </label>9780819479808 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronics -- Congresses<br/>Microélectronique -- Congrès<br/>Photonics -- Congresses<br/>Photonique -- Congrès<br/>Photons -- Congresses
<br/><br/><label>Dewey Class. No.: </label>621.31 NII