TY  - BOOK
AU  - Holmes, Andrew S
AU  - Meunier, Michel
ED  - SPIE (Society)
TI  - Laser applications in microelectronic and optoelectronic manufacturing VII : 26-29 January 2009, San Jose, California, United States
SN  - 9780819474476
SN  - 201045520
U1  - 621.381 MEU 
PY  - 2009///
CY  - Bellingham, WA
PB  - SPIE
KW  - Lasers - Industrial applications - Congresses
KW  - Manufacturing processes - Congresses
KW  - Microelectronics industry - Congresses
KW  - Optoelectronics industry - Congresses
N1  - Includes bibliographical references and index
ER  -