TY  - BOOK
AU  - Gower, M
ED  - Society of Photo-optical Instrumentation Engineers
TI  - Laser applications in microelectronic and optoelectronic manufacturing VI : 22-24 January 2001, San Jose, USA
SN  - 9780819439529
SN  - 200127563
U1  - 621.31 GOW 
PY  - 2001///
CY  - Bellingham, WA
PB  - SPIE
KW  - Lasers - Industrial applications - Congresses
KW  - Manufacturing processes - Congresses
KW  - Microelectronics industry - Congresses
KW  - Optoelectronics industry - Congresses
N1  - Includes bibliographical references and index
ER  -