Laser applications in microelectronic and optoelectronic manufacturing VI : 22-24 January 2001, San Jose, USA 
Malcolm C. Gower ... [et al.], chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering 
 - Bellingham, WA  SPIE  c2001 
 - x, 506 p. : ill. ; 28 cm 
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780819439529 
<br/><br/><label>ISSN: </label>2001275638 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Lasers - Industrial applications - Congresses<br/>Manufacturing processes - Congresses<br/>Microelectronics industry - Congresses<br/>Optoelectronics industry - Congresses
<br/><br/><label>Dewey Class. No.: </label>621.31 GOW