TY  - BOOK
AU  - Helvajian, Henry
ED  - Society of Photo-optical Instrumentation Engineers, United States. Air Force
TI  - Laser applications in microelectronic and optoelectronic manufacturing V : 24-26 January, 2000, San Jose, USA
SN  - 9780819435507
SN  - 200126684
U1  - 621.381 HEL 
PY  - 2000///
CY  - Bellingham, WA
PB  - SPIE
KW  - Laser ablation - Congresses
KW  - Lasers - Industrial applications - Congresses
KW  - Manufacturing processes - Congresses
KW  - Microelectronics industry - Equipment and supplies - Congresses
KW  - Optoelectronic devices - Design and construction - Congresses
N1  - Includes bibliographical references and index
ER  -