Laser applications in microelectronic and optoelectronic manufacturing V : 24-26 January, 2000, San Jose, USA 
Henry Helvajian, ... [et al.], chairs/editors ; sponsored by AFOSR--U.S. Air Force Office of Scientific Research [and] SPIE--the International Society for Optical Engineering 
 - Bellingham, WA  SPIE  c2000 
 - xi, 514 p. : ill. ; 28 cm 
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780819435507 
<br/><br/><label>ISSN: </label>2001266844 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Laser ablation - Congresses<br/>Lasers - Industrial applications - Congresses<br/>Manufacturing processes - Congresses<br/>Microelectronics industry - Equipment and supplies - Congresses<br/>Optoelectronic devices - Design and construction - Congresses
<br/><br/><label>Dewey Class. No.: </label>621.381 HEL