TY  - BOOK
AU  - Gerlach, Gerald
AU  - Dötzel, Wolfram
AU  - Muller, Dorte
TI  - Introduction to microsystem technology : a guide for students
SN  - 9780470058619
SN  - 200705017
U1  - 621 GER 
PY  - 2008///
CY  - Chichester, England ; Hoboken, NJ
PB  - J. Wiley & Sons
KW  - Microelectromechanical systems - Design and construction
KW  - Microelectronics
KW  - System design
N1  - Includes bibliographical references and index. Translated from the German
ER  -