Gerlach, Gerald <br/><br/>
Introduction to microsystem technology : a guide for students 
Gerald Gerlach, Wolfram Dotzel ; translated by Dorte Muller 
 - Chichester, England ; Hoboken, NJ  J. Wiley & Sons  c2008 
 - xxiii, 351 p. : ill. ; 26 cm 
<br/><br/> Includes bibliographical references and index. Translated from the German 
<br/><br/><label>ISBN: </label>9780470058619 
<br/><br/><label>ISSN: </label>2007050172 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems - Design and construction<br/>Microelectronics<br/>System design
<br/><br/><label>Dewey Class. No.: </label>621 GER