TY  - BOOK
AU  - Franssila, Sami
TI  - Introduction to microfabrication
SN  - 9780470851067
SN  - 200400494
U1  - 621.3 FRA 
PY  - 2004///
CY  - Hoboken, NJ
PB  - J. Wiley
KW  - Electronic apparatus and appliances
KW  - Microelectromechanical systems
KW  - Microfabrication
N1  - Includes bibliographical references and index
ER  -