TY  - BOOK
AU  - Jaeger, Richard C
TI  - Introduction to microelectronic fabrication
SN  - 9780201444940
SN  - 200227601
U1  - 621.395 JAE 
PY  - 2002///
CY  - Upper Saddle River, NJ
PB  - Prentice Hall
KW  - Integrated circuits - Very large scale integration - Design and construction - Textbooks
N1  - Includes bibliographical references and index
ER  -