Jaeger, Richard C <br/><br/>
Introduction to microelectronic fabrication 
Richard C. Jaeger 
 - 2nd ed 
 - Upper Saddle River, NJ  Prentice Hall  2002 
 - xiv, 316 p. : ill. ; 24 cm 
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780201444940 
<br/><br/><label>ISSN: </label>2002276015 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits - Very large scale integration - Design and construction - Textbooks
<br/><br/><label>Dewey Class. No.: </label>621.395 JAE