TY  - BOOK
AU  - Eizenberg, M
AU  - Murarka, S P
AU  - Sinha A K
TI  - Interlayer dielectrics for semiconductor technologies
SN  - 9780125112215
U1  - 621.38152 MUR 
PY  - 2003///
CY  - Amsterdam ; Boston
PB  - Elsevier, Elsevier / Academic Press
ER  -