Interlayer dielectrics for semiconductor technologies 
edited by S P Murarka,Eizenberg M and Sinha A K 
 - Amsterdam ; Boston  Elsevier, Elsevier / Academic Press  2003 
 - xiv,444p 
<br/><br/><label>ISBN: </label>9780125112215 
<br/><br/><label>Dewey Class. No.: </label>621.38152 MUR