TY  - BOOK
AU  - Athale, Ravindra A
AU  - Zolper, J. C
ED  - Society of Photo-optical Instrumentation Engineers
TI  - Intelligent integrated microsystems : 19-21 April, 2006, Kissimmee, Florida, USA
SN  - 9780819462886
SN  - 200628521
U1  - 621 ATH 
PY  - 2006///
CY  - Bellingham, WA
PB  - SPIE
KW  - Microelectromechanical systems - Congresses
N1  - Includes bibliographical references and index
ER  -