Intelligent integrated microsystems : 19-21 April, 2006, Kissimmee, Florida, USA 
Ravindra A. Athale, John C. Zolper, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering 
 - Bellingham, WA  SPIE  c2006 
 - 1 v. (various pagings) : ill. ; 28 cm 
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780819462886 
<br/><br/><label>ISSN: </label>2006285219 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems - Congresses
<br/><br/><label>Dewey Class. No.: </label>621 ATH