Instrumentation, metrology, and standards for nanomanufacturing III : 3-5 August 2009, San Diego, California, United States 
Michael T. Postek, John A. Allgair, editors ; sponsored by SPIE ; technical cosponsor, NIST--National Institute of Standards and Technology (United States) 
 - Bellingham, WA  SPIE  2009 
 - ix, 1 v. (various pagings) : ill. ; 28 cm 
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780819476951 
<br/><br/><label>ISSN: </label>2010286669 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microfabrication - Congresses<br/>Nanostructured materials - Congresses<br/>Nanotechnology - Congresses
<br/><br/><label>Dewey Class. No.: </label>620.5 POS