TY  - BOOK
AU  - Amberiadis, Kostas
ED  - European Commission. Directorate-General XII, Science, Research, and Development, European Optical Society, Institution of Electrical Engineers, Scottish Enterprise, Sira Technology Centre (U.K.), Society of Photo-optical Instrumentation Engineers
TI  - In-line characterization, yield reliability, and failure analyses in microelectronic manufacturing : 19-21 May, 1999, Edinburgh, Scotland
SN  - 9780819432230
SN  - 266407
U1  - 621.3815 AMB 
PY  - 1999///
CY  - Bellingham, WA
PB  - SPIE
KW  - Integrated circuits - Very large scale integration - Design and construction - Congresses
KW  - Manufacturing processes - Congresses
KW  - Microelectronics - Materials - Congresses
KW  - Semiconductors - Design and construction - Congresses
N1  - Includes bibliographical references and index
ER  -